Nanostructuring of SnO<sub>2</sub> Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications
SnO<sub>2</sub> thin films were prepared by conventional and Glancing Angle Deposition reactive sputtering, and their gas sensing properties were investigated. The porosity of the as-prepared films was widely assessed using optical methods, and the sensing performances of these active la...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-10-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/10/10/426 |