Nanostructuring of SnO<sub>2</sub> Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications

Nanostructuring of SnO<sub>2</sub> Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications

SnO<sub>2</sub> thin films were prepared by conventional and Glancing Angle Deposition reactive sputtering, and their gas sensing properties were investigated. The porosity of the as-prepared films was widely assessed using optical methods, and the sensing performances of these active la...

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Bibliographic Details
Main Authors: Achraf El Mohajir, Mohammad Arab Pour Yazdi, Anna Krystianiak, Olivier Heintz, Nicolas Martin, Franck Berger, Jean-Baptiste Sanchez
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Chemosensors
Subjects:
GLAD
SnO<sub>2</sub>
nanocolumns
BTEX gas sensor
porous architecture
Online Access:https://www.mdpi.com/2227-9040/10/10/426

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