Improved route to a diphenoxide-based precursor for chemical vapour deposition of parylene AF-4
In this work, we present the synthesis of an alternative precursor for chemical vapour deposition of parylene AF-4 to the widely used standard, octafluoro[2.2]paracyclophane. The standard precursor suffers from uncertainties in its supply chain and its synthesis is of low yield. A comparison between...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Royal Society
2021-04-01
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| Series: | Royal Society Open Science |
| Subjects: | |
| Online Access: | https://royalsocietypublishing.org/doi/10.1098/rsos.201921 |