Evaluation of lattice curvature and crystalline homogeneity for 2-inch GaN homo-epitaxial layer

Evaluation of lattice curvature and crystalline homogeneity for 2-inch GaN homo-epitaxial layer

We evaluated the lattice curvature, crystallinity, and crystalline homogeneity of a GaN layer on a free standing GaN substrate using lattice orientation measurements, θ rocking curves, and reciprocal space mapping from synchrotron X-ray diffraction topography, and X-ray diffraction. The lattice curv...

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Bibliographic Details
Main Authors: Okkyun Seo, Jae Myung Kim, Chulho Song, Yanfang Lou, L. S. R. Kumara, Satoshi Hiroi, Yanna Chen, Yoshio Katsuya, Yoshihiro Irokawa, Toshihide Nabatame, Yasuo Koide, Osami Sakata
Format: Article
Language:English
Published: AIP Publishing LLC 2018-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5042098

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http://dx.doi.org/10.1063/1.5042098

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