Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators

Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators

The increasing use of mobile broadband requires new acoustic filtering technologies that can operate efficiently at frequencies above 6 GHz. Previous research has shown that AlN Super High Frequency (SHF) Cross-Sectional Lamé Mode resonators (CLMRs) can address this challenge, but their performance...

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Bibliographic Details
Main Authors: Meruyert Assylbekova, Michele Pirro, Xuanyi Zhao, Giuseppe Michetti, Pietro Simeoni, Matteo Rinaldi
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Micromachines
Subjects:
AlScN
MEMS resonators
Contour Lamé Mode resonators
beyond 6 GHz
piezoelectric
Online Access:https://www.mdpi.com/2072-666X/14/3/515

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https://www.mdpi.com/2072-666X/14/3/515

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