Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves

Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves

We report the design, fabrication and characterization of micromachined Parylene structures for self-sealing liquid encapsulation applications. Automatic sealing is enabled through the use of an integrated annular-plate stiction valve which greatly reduces device footprint over in-plane configuratio...

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Bibliographic Details
Main Authors: Christian A. Gutierrez, Ellis Meng
Format: Article
Language:English
Published: MDPI AG 2011-09-01
Series:Micromachines
Subjects:
Parylene C
liquid encapsulation
stiction
Online Access:http://www.mdpi.com/2072-666X/2/3/356/

Internet

http://www.mdpi.com/2072-666X/2/3/356/

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