A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology
An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments....
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-12-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/14/12/23337 |