Model of Reactive Magnetron Sputtering of a Two-Component Composite Target
The article proposes a model for predicting the content of metal components of complex oxide films deposited by reactive magnetron sputtering of a two-component composite target in Ar/O2 gas mixture. The model takes into account the sputtering yield and ion-electron emission coefficients of the sput...
| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Russian |
| Publicado em: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-06-01
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| coleção: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Assuntos: | |
| Acesso em linha: | https://doklady.bsuir.by/jour/article/view/3642 |