High Reflectivity AlN/Al<sub>1−x</sub>In<sub>x</sub>N Distributed Bragg Reflectors across the UV Regions by Sputtering
To improve the performance of III-nitride compound semiconductor-based optoelectronic devices, highly reflective distributed Bragg reflectors (DBRs) are a requirement. In this report, AlN and Al<sub>1−x</sub>In<sub>x</sub>N layers were first sputtered and characterized concer...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-01-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/12/2/162 |