Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates

Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates

Bibliographic Details
Main Authors: Gulnur Akhtanova, Yerassyl Yerlanuly, Hryhorii P. Parkhomenko, Mykhailo V. Solovan, Andrii I. Mostovyi, Aliya K. Nurmukhanbetova, Alexander V. Kireyev, Igor V. Danko, Pavel A. Oreshkin, Timur K. Zholdybayev, Daniyar M. Janseitov, Tlekkabul S. Ramazanov, Viktor V. Brus
Format: Article
Language:English
Published: American Chemical Society 2023-12-01
Series:ACS Omega
Online Access:https://doi.org/10.1021/acsomega.3c07053

Internet

https://doi.org/10.1021/acsomega.3c07053

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