Annealing effects on recombinative activity of nickel at direct silicon bonded interface

By performing capacitance transient analyses, the recombination activity at a (110)/(100) direct silicon bonded (DSB) interface contaminated with nickel diffused at different temperatures, as a model of grain boundaries in multicrystalline silicon, was studied. The trap level depth from the valence...

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Bibliografske podrobnosti
Main Authors: Takuto Kojima, Yoshio Ohshita, Masafumi Yamaguchi
Format: Article
Jezik:English
Izdano: AIP Publishing LLC 2015-09-01
Serija:AIP Advances
Online dostop:http://dx.doi.org/10.1063/1.4931083