Evolution of surface morphology and properties of diamond films by hydrogen plasma etching
The micron-scale diamond film was prepared using hydrogen and methane as the mixed gas supplies via self-developed 3 kW/2,450 MHz microwave plasma chemical vapor deposition (MPCVD) equipment. On this basis, the evolution of the surface morphology, hydrophobicity, and electrical properties of samples...
| Hauptverfasser: | , , , , , |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
De Gruyter
2023-01-01
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| Schriftenreihe: | Green Processing and Synthesis |
| Schlagworte: | |
| Online Zugang: | https://doi.org/10.1515/gps-2022-8110 |