Micromecanizado mediante láseres de femtosegundos de cerámicas LTCC. Fabricación de microcalentadores para un sensor de monóxido de carbono
In present work, the processability of LTCC (Low Temperature Co-fired Ceramics) by means of femtosecond laser ablation is shown. This kind of material, with a clear technological interest in the development of microsensors, possesses a high mechanical fragility in the sintered state and, consequentl...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2007-08-01
|
| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/236/249 |