Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the sides of the resonant plate helps as a mechanical v...

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Bibliographic Details
Main Authors: Temesgen Bailie Workie, Zhaohui Wu, Panliang Tang, Jingfu Bao, Ken-ya Hashimoto
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
acoustic resonators
effective electromechanical coupling coefficient
figure of merit
quality factor
insertion loss
RF-MEMS
Online Access:https://www.mdpi.com/2072-666X/13/1/105

Internet

https://www.mdpi.com/2072-666X/13/1/105

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