Custom vacuum load-lock for the sputtering vacuum chamber, loading/unloading and locking automatisation mechanisms

Bibliographic Details
Main Authors:	D.I. Țarcă, T. Costea, I. Moga
Format:	Article
Language:	English
Published:	Editura Universităţii din Oradea 2020-09-01
Series:	Annals of the Oradea University: Fascicle Management and Technological Engineering
Online Access:	https://imt.uoradea.ro/auo.fmte/files-2020-v2/49-D I Tarca-Custom vacuum load-lock for the sputtering vacuum chamber, loading-unloading and locking automatisation mechanisms.pdf

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