A Novel p-Type ZnCo<sub>x</sub>O<sub>y</sub> Thin Film Grown by Atomic Layer Deposition
Reported herein is the atomic layer deposition (ALD) of novel ternary ZnCo<sub>x</sub>O<sub>y</sub> films possessing p-type semiconducting behavior. The preparation comprises of optimized ZnO and Co<sub>3</sub>O<sub>4</sub> deposition in sub-cycles usi...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-09-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/19/3381 |