A Novel p-Type ZnCo<sub>x</sub>O<sub>y</sub> Thin Film Grown by Atomic Layer Deposition

A Novel p-Type ZnCo<sub>x</sub>O<sub>y</sub> Thin Film Grown by Atomic Layer Deposition

Reported herein is the atomic layer deposition (ALD) of novel ternary ZnCo<sub>x</sub>O<sub>y</sub> films possessing p-type semiconducting behavior. The preparation comprises of optimized ZnO and Co<sub>3</sub>O<sub>4</sub> deposition in sub-cycles usi...

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Bibliographic Details
Main Authors:	Leyi Li, Zhixin Wan, Quan Wen, Zesheng Lv, Bin Xi
Format:	Article
Language:	English
Published:	MDPI AG 2022-09-01
Series:	Nanomaterials
Subjects:	atomic layer deposition (ALD) ZnCo<sub>x</sub>O<sub>y</sub> film p-type metal oxides
Online Access:	https://www.mdpi.com/2079-4991/12/19/3381

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