Quantitative Boundary Support Characterization for Cantilever MEMS
Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invar...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2007-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/7/10/2062/ |