Quantitative Boundary Support Characterization for Cantilever MEMS
Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invar...
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| Format: | Article |
| Language: | English |
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MDPI AG
2007-10-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/7/10/2062/ |
| _version_ | 1811184416021544960 |
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| author | Ion Stiharu Muthukumaran Packirisamy Gino Rinaldi |
| author_facet | Ion Stiharu Muthukumaran Packirisamy Gino Rinaldi |
| author_sort | Ion Stiharu |
| collection | DOAJ |
| description | Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be quantified only after the fabrication of the device through testing. However, MEMSare batch fabricated in large numbers where individual testing is neither possible nor costeffective. Hence, a suitable test algorithm needs to be developed where the test resultsobtained for a few devices can be applied to the whole fabrication batch, and also to thefoundry process in general. In this regard, this paper proposes a method to test MEMScantilevers under variant electro-thermal influences in order to quantify the effectiveboundary support condition obtained for a foundry process. A non-contact optical sensingapproach is employed for the dynamic testing. The Rayleigh-Ritz energy method usingboundary characteristic orthogonal polynomials is employed for the modeling andtheoretical analysis. |
| first_indexed | 2024-04-11T13:11:51Z |
| format | Article |
| id | doaj.art-b667a326e1e64c308fd29ec17549f3e7 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T13:11:51Z |
| publishDate | 2007-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-b667a326e1e64c308fd29ec17549f3e72022-12-22T04:22:34ZengMDPI AGSensors1424-82202007-10-017102062207910.3390/s7102062Quantitative Boundary Support Characterization for Cantilever MEMSIon StiharuMuthukumaran PackirisamyGino RinaldiMicrofabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static anddynamic qualities of such microscale devices are directly related to the invariant and variantproperties of the microsystem. Among the invariant properties, microfabrication limitationscan be quantified only after the fabrication of the device through testing. However, MEMSare batch fabricated in large numbers where individual testing is neither possible nor costeffective. Hence, a suitable test algorithm needs to be developed where the test resultsobtained for a few devices can be applied to the whole fabrication batch, and also to thefoundry process in general. In this regard, this paper proposes a method to test MEMScantilevers under variant electro-thermal influences in order to quantify the effectiveboundary support condition obtained for a foundry process. A non-contact optical sensingapproach is employed for the dynamic testing. The Rayleigh-Ritz energy method usingboundary characteristic orthogonal polynomials is employed for the modeling andtheoretical analysis.http://www.mdpi.com/1424-8220/7/10/2062/MEMScantileversmicrofabricationboundary supportRayleigh-Ritz |
| spellingShingle | Ion Stiharu Muthukumaran Packirisamy Gino Rinaldi Quantitative Boundary Support Characterization for Cantilever MEMS Sensors MEMS cantilevers microfabrication boundary support Rayleigh-Ritz |
| title | Quantitative Boundary Support Characterization for Cantilever MEMS |
| title_full | Quantitative Boundary Support Characterization for Cantilever MEMS |
| title_fullStr | Quantitative Boundary Support Characterization for Cantilever MEMS |
| title_full_unstemmed | Quantitative Boundary Support Characterization for Cantilever MEMS |
| title_short | Quantitative Boundary Support Characterization for Cantilever MEMS |
| title_sort | quantitative boundary support characterization for cantilever mems |
| topic | MEMS cantilevers microfabrication boundary support Rayleigh-Ritz |
| url | http://www.mdpi.com/1424-8220/7/10/2062/ |
| work_keys_str_mv | AT ionstiharu quantitativeboundarysupportcharacterizationforcantilevermems AT muthukumaranpackirisamy quantitativeboundarysupportcharacterizationforcantilevermems AT ginorinaldi quantitativeboundarysupportcharacterizationforcantilevermems |