Entropy Generation and Thermoelastic Damping in the In-plane Vibration of Microring Resonators
Thermoelastic damping is a critical issue for designing very high quality factor microresonators. This paper derives the entropy generation, associated with the irreversibility in heat conduction, that is used for ring resonators in in-plane vibration and presents an analytical model of thermoelasti...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-06-01
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| Series: | Entropy |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1099-4300/21/7/631 |