The thermoelastic stresses during laser annealing of titanium dioxide on a sapphire substrate
In order to analyze the technique of laser annealing of titanium dioxide films on sapphire substrates and to optimize the film properties, a thermomechanical model of this technique has been considered. The model allowed us to monitor and vary the values of thermoelastic stresses in the film-substra...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Peter the Great St.Petersburg Polytechnic University
2022-09-01
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| Series: | St. Petersburg Polytechnical University Journal: Physics and Mathematics |
| Subjects: | |
| Online Access: | https://physmath.spbstu.ru/article/2022.57.08/ |