Influence of Terbium Doping and Annealing on the Structural and Optical Characteristics of Sputtered Zinc Oxide Thin Films

Influence of Terbium Doping and Annealing on the Structural and Optical Characteristics of Sputtered Zinc Oxide Thin Films

This paper studied the structural and luminescent characteristics of undoped and doped-with-Tb<sup>3+</sup>-ions ZnO films of 200 nm and 600 nm thicknesses, grown via RF magnetron sputtering on (100) silicon substrate in Ar and Ar-O<sub>2</sub> plasma. X-ray diffraction (XRD)...

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Bibliographic Details
Main Authors: Tetyana Kryshtab, Lyudmyla Borkovska, Roberto Benjamín Cortés Herrera, Andriy Kryvko, Oleksandr Kolomys, Sergiy Mamykin, Xavier Portier
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Crystals
Subjects:
ZnO
terbium
RF magnetron sputtering
structure
photoluminescence
annealing
Online Access:https://www.mdpi.com/2073-4352/13/8/1200

Internet

https://www.mdpi.com/2073-4352/13/8/1200

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