Processing and Characterization of Monolithic Passive-Matrix GaN-Based MicroLED Arrays With Pixel Sizes From 5 to 50 µm

Processing and Characterization of Monolithic Passive-Matrix GaN-Based MicroLED Arrays With Pixel Sizes From 5 to 50 µm

MicroLED arrays with the capability of switching each pixel separately with high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain for the fabrication of passive-matrix m...

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Bibliographic Details
Main Authors: Steffen Bornemann, Jan Gulink, Victor Moro, Joan Canals Gil, Stefan Wolter, Georg Schottler, Daria Bezshlyakh, Joan Daniel Prades, Angel Dieguez, Andreas Waag
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Photonics Journal
Subjects:
III-V semiconductor materials
Inorganic light-emitting diodes
Micro-light emitting diode array
Online Access:https://ieeexplore.ieee.org/document/9520267/

Internet

https://ieeexplore.ieee.org/document/9520267/

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