Charged particle single nanometre manufacturing

Charged particle single nanometre manufacturing

Following a brief historical summary of the way in which electron beam lithography developed out of the scanning electron microscope, three state-of-the-art charged-particle beam nanopatterning technologies are considered. All three have been the subject of a recently completed European Union Projec...

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Bibliographic Details
Main Authors: Philip D. Prewett, Cornelis W. Hagen, Claudia Lenk, Steve Lenk, Marcus Kaestner, Tzvetan Ivanov, Ahmad Ahmad, Ivo W. Rangelow, Xiaoqing Shi, Stuart A. Boden, Alex P. G. Robinson, Dongxu Yang, Sangeetha Hari, Marijke Scotuzzi, Ejaz Huq
Format: Article
Language:English
Published: Beilstein-Institut 2018-11-01
Series:Beilstein Journal of Nanotechnology
Subjects:
charged particle beams
electron
field emission
ion
nanolithography
Online Access:https://doi.org/10.3762/bjnano.9.266

Internet

https://doi.org/10.3762/bjnano.9.266

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