Rutile TiO2 thin films growth on glass substrates with generation of high entropy interface
TiO2 thin films obtained through Reactive Magnetron Sputtering (RMS) have been extensively studied in the last decades for several applications as photocatalyst and self-cleaning coats. However, reactive deposition through MS onto large area substrates can be troublesome due to inhomogeneous films t...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-05-01
|
| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785423005355 |