Rutile TiO2 thin films growth on glass substrates with generation of high entropy interface

Rutile TiO2 thin films growth on glass substrates with generation of high entropy interface

TiO2 thin films obtained through Reactive Magnetron Sputtering (RMS) have been extensively studied in the last decades for several applications as photocatalyst and self-cleaning coats. However, reactive deposition through MS onto large area substrates can be troublesome due to inhomogeneous films t...

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Bibliographic Details
Main Authors: M.E.P. Missner, J. Stryhalski, M. Tomiyama, P. Soares, A.A.C. Recco, L.C. Fontana
Format: Article
Language:English
Published: Elsevier 2023-05-01
Series:Journal of Materials Research and Technology
Subjects:
Thin film Rutile TiO2
Sputtering
Hydrophilic
High entropy interface
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785423005355

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