High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction

In this work, we propose the lateral metal-germanium-metal photodetectors (PDs) structure on the silicon-on-insulator platform for short-wave infrared (SWIR) applications. The proposed device utilizes the highly <italic>n</italic>-doped amorphous silicon (a-Si:H) interlayer between metal...

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Main Authors: Harshvardhan Kumar, Chu-Hsuan Lin
Format: Article
Language:English
Published: IEEE 2023-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10016715/
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author Harshvardhan Kumar
Chu-Hsuan Lin
author_facet Harshvardhan Kumar
Chu-Hsuan Lin
author_sort Harshvardhan Kumar
collection DOAJ
description In this work, we propose the lateral metal-germanium-metal photodetectors (PDs) structure on the silicon-on-insulator platform for short-wave infrared (SWIR) applications. The proposed device utilizes the highly <italic>n</italic>-doped amorphous silicon (a-Si:H) interlayer between metallic contact and low <italic>n</italic>-doped germanium active region to achieve a low dark current. Additionally, the tuning of Schottky barrier height (SBH) by the selection of various metallic contacts (Cr&#x002F;W&#x002F;Mo) has been investigated in order to achieve a large reduction in dark current. With a-Si:H interlayer and Mo metallic contacts at both anode and cathode terminals, the simulated energy band diagram shows that an effective increase in SBH of 0.17 eV and 0.766 eV for electrons and holes, respectively, and thus acts as barriers for electron and hole dark currents. The result shows that the Mo metallic contact device manifests the least dark current (dark current density) of 0.27 pA (0.027 mA&#x002F;cm<sup>2</sup>) at V<sub>bias</sub> of 0.25 V and compared to Cr contact, it has been significantly decreased by two orders of magnitude. In addition, with Mo contact, the proposed device achieves the photogenerated-to-dark current <inline-formula><tex-math notation="LaTeX">$( {{I}_{ph}/{I}_{dark}} )$</tex-math></inline-formula> ratio and the responsivity of <inline-formula><tex-math notation="LaTeX">$\sim 1.7 \times {10}^6$</tex-math></inline-formula> and 0.96 A&#x002F;W, respectively at &#x03BB; &#x003D; 1.55 &#x03BC;m with V<sub>bias</sub> of 0.25 V. Furthermore, the proposed Mo-Ge-Mo PD shows high detectivity (NEP) of <inline-formula><tex-math notation="LaTeX">$9 \times {10}^{11}$</tex-math></inline-formula> cmHz<sup>1&#x002F;2</sup>W<sup>&#x2212;1</sup> (<inline-formula><tex-math notation="LaTeX">$\sim 3 \times {10}^{ - 16}$</tex-math></inline-formula>WHz<sup>&#x2212;0.5</sup>), which is nearly 15 (one order lower) times higher than those of Cr-Ge-Cr PD. The results hold great potential for optoelectronic applications requiring low-power Ge-based PD.
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spelling doaj.art-b7377767ed99430ba34df10b20e06fd72023-01-25T00:00:08ZengIEEEIEEE Photonics Journal1943-06552023-01-011511810.1109/JPHOT.2023.323681710016715High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current ReductionHarshvardhan Kumar0https://orcid.org/0000-0002-4803-810XChu-Hsuan Lin1https://orcid.org/0000-0001-5973-5157Department of Electronics and Communication Engineering, The LNM Institute of Information Technology, Jaipur, RJ, IndiaDepartment of Optoelectronics, National Dong Hwa University, Hualien County, TaiwanIn this work, we propose the lateral metal-germanium-metal photodetectors (PDs) structure on the silicon-on-insulator platform for short-wave infrared (SWIR) applications. The proposed device utilizes the highly <italic>n</italic>-doped amorphous silicon (a-Si:H) interlayer between metallic contact and low <italic>n</italic>-doped germanium active region to achieve a low dark current. Additionally, the tuning of Schottky barrier height (SBH) by the selection of various metallic contacts (Cr&#x002F;W&#x002F;Mo) has been investigated in order to achieve a large reduction in dark current. With a-Si:H interlayer and Mo metallic contacts at both anode and cathode terminals, the simulated energy band diagram shows that an effective increase in SBH of 0.17 eV and 0.766 eV for electrons and holes, respectively, and thus acts as barriers for electron and hole dark currents. The result shows that the Mo metallic contact device manifests the least dark current (dark current density) of 0.27 pA (0.027 mA&#x002F;cm<sup>2</sup>) at V<sub>bias</sub> of 0.25 V and compared to Cr contact, it has been significantly decreased by two orders of magnitude. In addition, with Mo contact, the proposed device achieves the photogenerated-to-dark current <inline-formula><tex-math notation="LaTeX">$( {{I}_{ph}/{I}_{dark}} )$</tex-math></inline-formula> ratio and the responsivity of <inline-formula><tex-math notation="LaTeX">$\sim 1.7 \times {10}^6$</tex-math></inline-formula> and 0.96 A&#x002F;W, respectively at &#x03BB; &#x003D; 1.55 &#x03BC;m with V<sub>bias</sub> of 0.25 V. Furthermore, the proposed Mo-Ge-Mo PD shows high detectivity (NEP) of <inline-formula><tex-math notation="LaTeX">$9 \times {10}^{11}$</tex-math></inline-formula> cmHz<sup>1&#x002F;2</sup>W<sup>&#x2212;1</sup> (<inline-formula><tex-math notation="LaTeX">$\sim 3 \times {10}^{ - 16}$</tex-math></inline-formula>WHz<sup>&#x2212;0.5</sup>), which is nearly 15 (one order lower) times higher than those of Cr-Ge-Cr PD. The results hold great potential for optoelectronic applications requiring low-power Ge-based PD.https://ieeexplore.ieee.org/document/10016715/High-performancehigh detectivityhigh sensitivitylow dark currentphotodetectorsshort-wave infrared
spellingShingle Harshvardhan Kumar
Chu-Hsuan Lin
High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction
IEEE Photonics Journal
High-performance
high detectivity
high sensitivity
low dark current
photodetectors
short-wave infrared
title High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction
title_full High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction
title_fullStr High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction
title_full_unstemmed High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction
title_short High-Performance Lateral Metal-Germanium-Metal SWIR Photodetectors Using a-Si:H Interlayer for Dark Current Reduction
title_sort high performance lateral metal germanium metal swir photodetectors using a si h interlayer for dark current reduction
topic High-performance
high detectivity
high sensitivity
low dark current
photodetectors
short-wave infrared
url https://ieeexplore.ieee.org/document/10016715/
work_keys_str_mv AT harshvardhankumar highperformancelateralmetalgermaniummetalswirphotodetectorsusingasihinterlayerfordarkcurrentreduction
AT chuhsuanlin highperformancelateralmetalgermaniummetalswirphotodetectorsusingasihinterlayerfordarkcurrentreduction