Wafer Defect Localization and Classification Using Deep Learning Techniques

Wafer Defect Localization and Classification Using Deep Learning Techniques

Accurate detection and classification of wafer defects constitute an important component in semiconductor manufacturing. It provides interpretable information to find the possible root causes of defects and to take actions for quality management and yield improvement. Traditional approach to classif...

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Bibliographic Details
Main Authors: Prashant P. Shinde, Priyadarshini P. Pai, Shashishekar P. Adiga
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Semiconductor manufacturing
wafer defect detection
deep learning
YOLOv3
YOLOv4
Online Access:https://ieeexplore.ieee.org/document/9755177/

Internet

https://ieeexplore.ieee.org/document/9755177/

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