Anomalous PBTI Effects in N-Type Super Junction under High Gate Voltage Stress

In this work, an anomalous thick oxide-degradation phenomenon in n-type 650-V class super-junction VDMOS transistors is investigated. An unexpected threshold voltage (V<sub>t</sub>) decrease was observed with high positive bias temperature instability stress, and the saturation current (...

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Bibliographic Details
Main Authors: Hua Tang, Hang Xu, Lin Chen, Hao Zhu, Qingqing Sun
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Electronics
Subjects:
Online Access:https://www.mdpi.com/2079-9292/11/9/1362