Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors

It is shown that the threshold voltage of a GaAs ion-implanted metal-semiconductor field-effect transistor corresponds with a good accuracy to the voltage at which an inflection point appears in the capacitance-voltage characteristic. A method for predicting the threshold voltage of ion-implanted fi...

Full description

Bibliographic Details
Main Authors: Gorev N. B., Kodzhespirova I. F., Privalov E. N.
Format: Article
Language:English
Published: Politehperiodika 2007-12-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:http://www.tkea.com.ua/tkea/2007/6_2007/pdf/01.zip
_version_ 1818964936773074944
author Gorev N. B.
Kodzhespirova I. F.
Privalov E. N.
author_facet Gorev N. B.
Kodzhespirova I. F.
Privalov E. N.
author_sort Gorev N. B.
collection DOAJ
description It is shown that the threshold voltage of a GaAs ion-implanted metal-semiconductor field-effect transistor corresponds with a good accuracy to the voltage at which an inflection point appears in the capacitance-voltage characteristic. A method for predicting the threshold voltage of ion-implanted field-effect transistors using capacitance-voltage measurements prior to contact formation is proposed.
first_indexed 2024-12-20T13:09:02Z
format Article
id doaj.art-b797d1c97ad64f2d8f44c0e7c5793b5d
institution Directory Open Access Journal
issn 2225-5818
language English
last_indexed 2024-12-20T13:09:02Z
publishDate 2007-12-01
publisher Politehperiodika
record_format Article
series Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
spelling doaj.art-b797d1c97ad64f2d8f44c0e7c5793b5d2022-12-21T19:39:42ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182007-12-01635Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistorsGorev N. B.Kodzhespirova I. F.Privalov E. N.It is shown that the threshold voltage of a GaAs ion-implanted metal-semiconductor field-effect transistor corresponds with a good accuracy to the voltage at which an inflection point appears in the capacitance-voltage characteristic. A method for predicting the threshold voltage of ion-implanted field-effect transistors using capacitance-voltage measurements prior to contact formation is proposed.http://www.tkea.com.ua/tkea/2007/6_2007/pdf/01.zipgallium arsenidefield-effect transistorSchottky barrierthreshold voltagecapacitance-voltage characteristic
spellingShingle Gorev N. B.
Kodzhespirova I. F.
Privalov E. N.
Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
gallium arsenide
field-effect transistor
Schottky barrier
threshold voltage
capacitance-voltage characteristic
title Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
title_full Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
title_fullStr Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
title_full_unstemmed Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
title_short Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
title_sort prediction of the threshold voltage of gaas ion implanted metal semiconductor field effect transistors
topic gallium arsenide
field-effect transistor
Schottky barrier
threshold voltage
capacitance-voltage characteristic
url http://www.tkea.com.ua/tkea/2007/6_2007/pdf/01.zip
work_keys_str_mv AT gorevnb predictionofthethresholdvoltageofgaasionimplantedmetalsemiconductorfieldeffecttransistors
AT kodzhespirovaif predictionofthethresholdvoltageofgaasionimplantedmetalsemiconductorfieldeffecttransistors
AT privaloven predictionofthethresholdvoltageofgaasionimplantedmetalsemiconductorfieldeffecttransistors