Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors
It is shown that the threshold voltage of a GaAs ion-implanted metal-semiconductor field-effect transistor corresponds with a good accuracy to the voltage at which an inflection point appears in the capacitance-voltage characteristic. A method for predicting the threshold voltage of ion-implanted fi...
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Format: | Article |
Language: | English |
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Politehperiodika
2007-12-01
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Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
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Online Access: | http://www.tkea.com.ua/tkea/2007/6_2007/pdf/01.zip |
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author | Gorev N. B. Kodzhespirova I. F. Privalov E. N. |
author_facet | Gorev N. B. Kodzhespirova I. F. Privalov E. N. |
author_sort | Gorev N. B. |
collection | DOAJ |
description | It is shown that the threshold voltage of a GaAs ion-implanted metal-semiconductor field-effect transistor corresponds with a good accuracy to the voltage at which an inflection point appears in the capacitance-voltage characteristic. A method for predicting the threshold voltage of ion-implanted field-effect transistors using capacitance-voltage measurements prior to contact formation is proposed. |
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format | Article |
id | doaj.art-b797d1c97ad64f2d8f44c0e7c5793b5d |
institution | Directory Open Access Journal |
issn | 2225-5818 |
language | English |
last_indexed | 2024-12-20T13:09:02Z |
publishDate | 2007-12-01 |
publisher | Politehperiodika |
record_format | Article |
series | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
spelling | doaj.art-b797d1c97ad64f2d8f44c0e7c5793b5d2022-12-21T19:39:42ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182007-12-01635Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistorsGorev N. B.Kodzhespirova I. F.Privalov E. N.It is shown that the threshold voltage of a GaAs ion-implanted metal-semiconductor field-effect transistor corresponds with a good accuracy to the voltage at which an inflection point appears in the capacitance-voltage characteristic. A method for predicting the threshold voltage of ion-implanted field-effect transistors using capacitance-voltage measurements prior to contact formation is proposed.http://www.tkea.com.ua/tkea/2007/6_2007/pdf/01.zipgallium arsenidefield-effect transistorSchottky barrierthreshold voltagecapacitance-voltage characteristic |
spellingShingle | Gorev N. B. Kodzhespirova I. F. Privalov E. N. Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors Tekhnologiya i Konstruirovanie v Elektronnoi Apparature gallium arsenide field-effect transistor Schottky barrier threshold voltage capacitance-voltage characteristic |
title | Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors |
title_full | Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors |
title_fullStr | Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors |
title_full_unstemmed | Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors |
title_short | Prediction of the threshold voltage of GaAs ion-implanted metal-semiconductor field-effect transistors |
title_sort | prediction of the threshold voltage of gaas ion implanted metal semiconductor field effect transistors |
topic | gallium arsenide field-effect transistor Schottky barrier threshold voltage capacitance-voltage characteristic |
url | http://www.tkea.com.ua/tkea/2007/6_2007/pdf/01.zip |
work_keys_str_mv | AT gorevnb predictionofthethresholdvoltageofgaasionimplantedmetalsemiconductorfieldeffecttransistors AT kodzhespirovaif predictionofthethresholdvoltageofgaasionimplantedmetalsemiconductorfieldeffecttransistors AT privaloven predictionofthethresholdvoltageofgaasionimplantedmetalsemiconductorfieldeffecttransistors |