Nonlinear Modeling for Distortion Analysis in Silicon Bulk-Mode Ring Resonators

Nonlinear Modeling for Distortion Analysis in Silicon Bulk-Mode Ring Resonators

A distributed modeling approach has been developed to describe the dynamic behavior of ring resonators. The model includes the effect of large amplitudes around primary resonance frequencies, material and electrostatic nonlinearities. Through a combination of geometric and material nonlinearities, c...

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Bibliographic Details
Main Authors: Farshad Babazadeh, Sayyed-Hossein Keshmiri, Abolfazl Bijari
Format: Article
Language:English
Published: MDPI AG 2012-08-01
Series:Micromachines
Subjects:
harmonic distortions
intermodulation distortion
micromechanical device
nonlinear system
perturbation method
Online Access:http://www.mdpi.com/2072-666X/3/3/582

Internet

http://www.mdpi.com/2072-666X/3/3/582

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