An automatic measuring system for investigation of semiconductor device structures
The problems of development of an automatic measuring system for the study of semiconductor device structures parameters are considered. This system can be used both for experimental development of the technology for obtaining structures and for studies of the resistance of structures to various ext...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Povolzhskiy State University of Telecommunications & Informatics
2018-04-01
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| Series: | Физика волновых процессов и радиотехнические системы |
| Subjects: | |
| Online Access: | https://journals.ssau.ru/pwp/article/viewFile/6954/6816 |