An automatic measuring system for investigation of semiconductor device structures
The problems of development of an automatic measuring system for the study of semiconductor device structures parameters are considered. This system can be used both for experimental development of the technology for obtaining structures and for studies of the resistance of structures to various ext...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Povolzhskiy State University of Telecommunications & Informatics
2018-04-01
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| Series: | Физика волновых процессов и радиотехнические системы |
| Subjects: | |
| Online Access: | https://journals.ssau.ru/pwp/article/viewFile/6954/6816 |
| _version_ | 1797382596244537344 |
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| author | Y.N. Gorelov D.Y. Golubeva L.V. Kurganskaya A.V. Shcherbak |
| author_facet | Y.N. Gorelov D.Y. Golubeva L.V. Kurganskaya A.V. Shcherbak |
| author_sort | Y.N. Gorelov |
| collection | DOAJ |
| description | The problems of development of an automatic measuring system for the study of semiconductor device structures parameters are considered. This system can be used both for experimental development of the technology for obtaining structures and for studies of the resistance of structures to various external factors, including factors of open space. A block diagram of the measuring system is proposed, which allows changing its configuration by software to increase the number of measured parametersA block diagram of the measuring system is proposed, which allows changing its configuration by software to increase the number of measured parameters. A block diagram of the measuring system is proposed. This system is able to change its configuration programmatically to increase the number of measured parameters. The scheme of measuring ports and units of measuring system switching is offered. In this scheme, all ports are identical, which makes it possible to connect samples with different topology and number of contacts to the system. The possible variants of the schemes of measuring units that implement voltage-code, capacitance-code, code-current, etc. are proposed. |
| first_indexed | 2024-03-08T21:08:46Z |
| format | Article |
| id | doaj.art-b8384c597a2f4515893f003d68a53c24 |
| institution | Directory Open Access Journal |
| issn | 1810-3189 2782-294X |
| language | English |
| last_indexed | 2024-03-08T21:08:46Z |
| publishDate | 2018-04-01 |
| publisher | Povolzhskiy State University of Telecommunications & Informatics |
| record_format | Article |
| series | Физика волновых процессов и радиотехнические системы |
| spelling | doaj.art-b8384c597a2f4515893f003d68a53c242023-12-22T10:31:39ZengPovolzhskiy State University of Telecommunications & InformaticsФизика волновых процессов и радиотехнические системы1810-31892782-294X2018-04-0121471786524An automatic measuring system for investigation of semiconductor device structuresY.N. Gorelov0D.Y. Golubeva1L.V. Kurganskaya2A.V. Shcherbak3Самарский национальный исследовательский университет им. акад. С.П. КоролеваСамарский национальный исследовательский университет им. акад. С.П. КоролеваСамарский национальный исследовательский университет им. акад. С.П. КоролеваСамарский национальный исследовательский университет им. акад. С.П. КоролеваThe problems of development of an automatic measuring system for the study of semiconductor device structures parameters are considered. This system can be used both for experimental development of the technology for obtaining structures and for studies of the resistance of structures to various external factors, including factors of open space. A block diagram of the measuring system is proposed, which allows changing its configuration by software to increase the number of measured parametersA block diagram of the measuring system is proposed, which allows changing its configuration by software to increase the number of measured parameters. A block diagram of the measuring system is proposed. This system is able to change its configuration programmatically to increase the number of measured parameters. The scheme of measuring ports and units of measuring system switching is offered. In this scheme, all ports are identical, which makes it possible to connect samples with different topology and number of contacts to the system. The possible variants of the schemes of measuring units that implement voltage-code, capacitance-code, code-current, etc. are proposed.https://journals.ssau.ru/pwp/article/viewFile/6954/6816device structureelectrophysical propertiesautomatic measuring systems |
| spellingShingle | Y.N. Gorelov D.Y. Golubeva L.V. Kurganskaya A.V. Shcherbak An automatic measuring system for investigation of semiconductor device structures Физика волновых процессов и радиотехнические системы device structure electrophysical properties automatic measuring systems |
| title | An automatic measuring system for investigation of semiconductor device structures |
| title_full | An automatic measuring system for investigation of semiconductor device structures |
| title_fullStr | An automatic measuring system for investigation of semiconductor device structures |
| title_full_unstemmed | An automatic measuring system for investigation of semiconductor device structures |
| title_short | An automatic measuring system for investigation of semiconductor device structures |
| title_sort | automatic measuring system for investigation of semiconductor device structures |
| topic | device structure electrophysical properties automatic measuring systems |
| url | https://journals.ssau.ru/pwp/article/viewFile/6954/6816 |
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