An automatic measuring system for investigation of semiconductor device structures

An automatic measuring system for investigation of semiconductor device structures

The problems of development of an automatic measuring system for the study of semiconductor device structures parameters are considered. This system can be used both for experimental development of the technology for obtaining structures and for studies of the resistance of structures to various ext...

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Bibliographic Details
Main Authors: Y.N. Gorelov, D.Y. Golubeva, L.V. Kurganskaya, A.V. Shcherbak
Format: Article
Language:English
Published: Povolzhskiy State University of Telecommunications & Informatics 2018-04-01
Series:Физика волновых процессов и радиотехнические системы
Subjects:
device structure
electrophysical properties
automatic measuring systems
Online Access:https://journals.ssau.ru/pwp/article/viewFile/6954/6816

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