In Situ X-ray Measurements to Follow the Crystallization of BaTiO<sub>3</sub> Thin Films during RF-Magnetron Sputter Deposition

In Situ X-ray Measurements to Follow the Crystallization of BaTiO<sub>3</sub> Thin Films during RF-Magnetron Sputter Deposition

Here, we report on adding an important dimension to the fundamental understanding of the evolution of the thin film micro structure evolution. Thin films have gained broad attention in their applications for electro-optical devices, solar-cell technology, as well storage devices. Deep insights into...

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Bibliographic Details
Main Authors: Peter Walter, Markus Ilchen, JanTorben Roeh, Wiebke Ohm, Christian Bonar Zeuthen, Uwe Klemradt
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Applied Sciences
Subjects:
GISAXS
GIXRPD
XRR
in situ
synchrotron radiation
oxid thin films
Online Access:https://www.mdpi.com/2076-3417/11/19/8970

Internet

https://www.mdpi.com/2076-3417/11/19/8970

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