A High-Sensitivity Gravimetric Biosensor Based on S<sub>1</sub> Mode Lamb Wave Resonator
The development of MEMS acoustic resonators meets the increasing demand for in situ detection with a higher performance and smaller size. In this paper, a lithium niobate film-based S<sub>1</sub> mode Lamb wave resonator (HF-LWR) for high-sensitivity gravimetric biosensing is proposed. T...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-08-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/22/15/5912 |