A Strip-Type Microthrottle Pump: Modeling, Design and Fabrication
A novel design for a strip-type microthrottle pump with a rectangular actuator geometry is proposed, with more efficient chip surface consumption compared to existing micropumps with circular actuators. Due to the complex structure and operation of the proposed device, determination of detailed stru...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2013-03-01
|
Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/13/3/3092 |