Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions

Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions

Ruthenium (Ru) is a noble metal and is known to be resistant to many common chemicals and mixtures. We report in this study a controlled etching/recessing of Ru via wet processing and a combination of dry and wet process using metal-free chemical mixtures. The wet etching study was performed using b...

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Bibliographic Details
Main Authors: Q.T. Le, E. Gül Arslan, J. Rip, H. De Coster, P. Verdonck, D. Radisic, F. Schleicher, I. Vaesen, T. Conard, E. Altamirano-Sanchez
Format: Article
Language:English
Published: Elsevier 2023-06-01
Series:Micro and Nano Engineering
Subjects:
Ruthenium wet etching
Ruthenium residue removal
Ruthenium recess
Hydrogen plasma
XPS
Annealed ruthenium
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007223000382

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http://www.sciencedirect.com/science/article/pii/S2590007223000382

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