Turbomolecular pumps on conical active magnetic bearings
The adoption of magnetic levitation is experiencing a steady growth in the vacuum industry and, in particular, in turbomolecular pumps. Nowadays, the most common solutions for pumps of small and medium pumping capacity are based on hybrid architectures where passive magnetic bearings are combined to...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2017-06-01
|
| Series: | Mechanical Engineering Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/mej/4/5/4_16-00569/_pdf/-char/en |