A proposal of control system for natural frequency reducing method of anti-vibration apparatus
In the field of precision positioning such as semiconductor exposure apparatus, weak disturbance vibration from the floor influences processing accuracy. In recent years, as the precision of the device increases, the vibration allowance value becomes more severe, and performance improvement of the v...
| Main Authors: | , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2018-05-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/862/84_18-00043/_pdf/-char/en |