Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation

Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation

This paper researches the fabrication of a WR2.8 terahertz rectangular waveguide operating at the frequency ranging from 260 GHz to 400 GHz via UV-LIGA technology (UV-lithography, electroplating, and molding). In the process, megasonic agitation is applied to improve the mechanical properties and in...

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Bibliographic Details
Main Authors: Yongtao Li, Yi Wang, Hanyan Li, Bai Jiang, Fan Bai, Jinjun Feng
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Micromachines
Subjects:
terahertz
UV LIGA
megasonic agitation
rectangular waveguide
WR2.8
Online Access:https://www.mdpi.com/2072-666X/13/10/1601

Internet

https://www.mdpi.com/2072-666X/13/10/1601

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