Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation

Terahertz Rectangular Waveguides by UV-LIGA with Megasonic Agitation

This paper researches the fabrication of a WR2.8 terahertz rectangular waveguide operating at the frequency ranging from 260 GHz to 400 GHz via UV-LIGA technology (UV-lithography, electroplating, and molding). In the process, megasonic agitation is applied to improve the mechanical properties and in...

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Bibliographic Details
Main Authors:	Yongtao Li, Yi Wang, Hanyan Li, Bai Jiang, Fan Bai, Jinjun Feng
Format:	Article
Language:	English
Published:	MDPI AG 2022-09-01
Series:	Micromachines
Subjects:	terahertz UV LIGA megasonic agitation rectangular waveguide WR2.8
Online Access:	https://www.mdpi.com/2072-666X/13/10/1601

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