Wafer-scale nanofabrication of telecom single-photon emitters in silicon
The recently demonstrated approaches to fabrication of quantum emitters in silicon result in their random positioning, hindering applications in quantum photonic integrated circuits. Here the authors demonstrate controlled fabrication of telecom-wavelength quantum emitters in silicon wafers by focus...
Main Authors: | , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2022-12-01
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Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-022-35051-5 |