Wafer-scale nanofabrication of telecom single-photon emitters in silicon

The recently demonstrated approaches to fabrication of quantum emitters in silicon result in their random positioning, hindering applications in quantum photonic integrated circuits. Here the authors demonstrate controlled fabrication of telecom-wavelength quantum emitters in silicon wafers by focus...

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Bibliographic Details
Main Authors: Michael Hollenbach, Nico Klingner, Nagesh S. Jagtap, Lothar Bischoff, Ciarán Fowley, Ulrich Kentsch, Gregor Hlawacek, Artur Erbe, Nikolay V. Abrosimov, Manfred Helm, Yonder Berencén, Georgy V. Astakhov
Format: Article
Language:English
Published: Nature Portfolio 2022-12-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-022-35051-5