Insight on defects mechanically introduced by nanoindentation in 4H-SiC p-n diode
We investigate defects in 4H-SiC p-n junction diodes introduced trough nanoindentation procedure. A nanoindentation load range between 3 mN and 15 mN was explored. Scanning Electron Microscopy and Transmission Electron Microscopy analysis are adopted for the morphological and crystallographic invest...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2024-03-01
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Series: | Materials & Design |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127524001230 |