Review of laser scanning methods for microelectronic semiconductor structures investigation
The development and widespread of high-tech microelectronic products impose increased requirements on the quality and reliability of microcircuits. The most effective methods for reliability improvement of electronic systems include diagnostic non-destructive testing (NDT) methods and selective dest...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Joint Stock Company "Experimental Scientific and Production Association SPELS
2022-11-01
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| Series: | Безопасность информационных технологий |
| Subjects: | |
| Online Access: | https://bit.spels.ru/index.php/bit/article/view/1458 |