Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection

Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection

Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to...

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Bibliographic Details
Main Authors: Ghadi Dakroub, Thomas Duguet, Corinne Lacaze-Dufaure, Stéphanie Roualdes, Arie van der Lee, Diane Rebiscoul, Vincent Rouessac
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Plasma
Subjects:
organosilicon
VOCs
sorption
thin films
QCM
ellipsometry
Online Access:https://www.mdpi.com/2571-6182/6/3/39

Internet

https://www.mdpi.com/2571-6182/6/3/39

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