Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection

Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to...

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Main Authors: Ghadi Dakroub, Thomas Duguet, Corinne Lacaze-Dufaure, Stéphanie Roualdes, Arie van der Lee, Diane Rebiscoul, Vincent Rouessac
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Plasma
Subjects:
Online Access:https://www.mdpi.com/2571-6182/6/3/39
_version_ 1827724220905291776
author Ghadi Dakroub
Thomas Duguet
Corinne Lacaze-Dufaure
Stéphanie Roualdes
Arie van der Lee
Diane Rebiscoul
Vincent Rouessac
author_facet Ghadi Dakroub
Thomas Duguet
Corinne Lacaze-Dufaure
Stéphanie Roualdes
Arie van der Lee
Diane Rebiscoul
Vincent Rouessac
author_sort Ghadi Dakroub
collection DOAJ
description Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to determine the organosilicon films’ elemental composition and density. Spectroscopic ellipsometry measurements were carried out to determine the refractive index of the films. Quartz crystal microbalance (QCM) and ellipsometry coupled to vapor sorption were used to investigate the sorption mechanism of several VOC vapors into the films as a function of the plasma deposition conditions. The density and the refractive index of the PP-HMDSO films increased with the plasma energy due to a different chemical composition and different proportion of free volumes in the material network. The PP-HMDSO films showed different affinities towards the VOC vapors depending on the plasma discharge energy. The films elaborated in the lowest plasma energy revealed a good sensitivity towards the VOCs, especially toluene (one of the BTEX vapors), compared to the other films deposited under higher plasma energy. In addition, the selectivity between toluene and other non-BTEX VOCs such as heptane and ethanol decreased to become zero while increasing the plasma energy.
first_indexed 2024-03-10T22:12:42Z
format Article
id doaj.art-b9a88db8edd541e1bdbf17ab4b0e9c14
institution Directory Open Access Journal
issn 2571-6182
language English
last_indexed 2024-03-10T22:12:42Z
publishDate 2023-09-01
publisher MDPI AG
record_format Article
series Plasma
spelling doaj.art-b9a88db8edd541e1bdbf17ab4b0e9c142023-11-19T12:33:45ZengMDPI AGPlasma2571-61822023-09-016356357610.3390/plasma6030039Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) DetectionGhadi Dakroub0Thomas Duguet1Corinne Lacaze-Dufaure2Stéphanie Roualdes3Arie van der Lee4Diane Rebiscoul5Vincent Rouessac6CIRIMAT, University of Toulouse, CNRS UMR 5085, INP-ENSIACET, 31062 Toulouse, FranceCIRIMAT, University of Toulouse, CNRS UMR 5085, INP-ENSIACET, 31062 Toulouse, FranceCIRIMAT, University of Toulouse, CNRS UMR 5085, INP-ENSIACET, 31062 Toulouse, FranceIEM, CNRS UMR 5635, Univ Montpellier, CEDEX 5, 34095 Montpellier, FranceIEM, CNRS UMR 5635, Univ Montpellier, CEDEX 5, 34095 Montpellier, FranceICSM, CEA, CNRS UMR 5257, Univ Montpellier, 30216 Bagnols-sur-Cèze, FranceIEM, CNRS UMR 5635, Univ Montpellier, CEDEX 5, 34095 Montpellier, FrancePlasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to determine the organosilicon films’ elemental composition and density. Spectroscopic ellipsometry measurements were carried out to determine the refractive index of the films. Quartz crystal microbalance (QCM) and ellipsometry coupled to vapor sorption were used to investigate the sorption mechanism of several VOC vapors into the films as a function of the plasma deposition conditions. The density and the refractive index of the PP-HMDSO films increased with the plasma energy due to a different chemical composition and different proportion of free volumes in the material network. The PP-HMDSO films showed different affinities towards the VOC vapors depending on the plasma discharge energy. The films elaborated in the lowest plasma energy revealed a good sensitivity towards the VOCs, especially toluene (one of the BTEX vapors), compared to the other films deposited under higher plasma energy. In addition, the selectivity between toluene and other non-BTEX VOCs such as heptane and ethanol decreased to become zero while increasing the plasma energy.https://www.mdpi.com/2571-6182/6/3/39organosiliconVOCssorptionthin filmsQCMellipsometry
spellingShingle Ghadi Dakroub
Thomas Duguet
Corinne Lacaze-Dufaure
Stéphanie Roualdes
Arie van der Lee
Diane Rebiscoul
Vincent Rouessac
Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
Plasma
organosilicon
VOCs
sorption
thin films
QCM
ellipsometry
title Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
title_full Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
title_fullStr Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
title_full_unstemmed Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
title_short Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
title_sort plasma polymerized organosilicon thin films for volatile organic compound voc detection
topic organosilicon
VOCs
sorption
thin films
QCM
ellipsometry
url https://www.mdpi.com/2571-6182/6/3/39
work_keys_str_mv AT ghadidakroub plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection
AT thomasduguet plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection
AT corinnelacazedufaure plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection
AT stephanieroualdes plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection
AT arievanderlee plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection
AT dianerebiscoul plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection
AT vincentrouessac plasmapolymerizedorganosiliconthinfilmsforvolatileorganiccompoundvocdetection