Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to...
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MDPI AG
2023-09-01
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author | Ghadi Dakroub Thomas Duguet Corinne Lacaze-Dufaure Stéphanie Roualdes Arie van der Lee Diane Rebiscoul Vincent Rouessac |
author_facet | Ghadi Dakroub Thomas Duguet Corinne Lacaze-Dufaure Stéphanie Roualdes Arie van der Lee Diane Rebiscoul Vincent Rouessac |
author_sort | Ghadi Dakroub |
collection | DOAJ |
description | Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to determine the organosilicon films’ elemental composition and density. Spectroscopic ellipsometry measurements were carried out to determine the refractive index of the films. Quartz crystal microbalance (QCM) and ellipsometry coupled to vapor sorption were used to investigate the sorption mechanism of several VOC vapors into the films as a function of the plasma deposition conditions. The density and the refractive index of the PP-HMDSO films increased with the plasma energy due to a different chemical composition and different proportion of free volumes in the material network. The PP-HMDSO films showed different affinities towards the VOC vapors depending on the plasma discharge energy. The films elaborated in the lowest plasma energy revealed a good sensitivity towards the VOCs, especially toluene (one of the BTEX vapors), compared to the other films deposited under higher plasma energy. In addition, the selectivity between toluene and other non-BTEX VOCs such as heptane and ethanol decreased to become zero while increasing the plasma energy. |
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id | doaj.art-b9a88db8edd541e1bdbf17ab4b0e9c14 |
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issn | 2571-6182 |
language | English |
last_indexed | 2024-03-10T22:12:42Z |
publishDate | 2023-09-01 |
publisher | MDPI AG |
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series | Plasma |
spelling | doaj.art-b9a88db8edd541e1bdbf17ab4b0e9c142023-11-19T12:33:45ZengMDPI AGPlasma2571-61822023-09-016356357610.3390/plasma6030039Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) DetectionGhadi Dakroub0Thomas Duguet1Corinne Lacaze-Dufaure2Stéphanie Roualdes3Arie van der Lee4Diane Rebiscoul5Vincent Rouessac6CIRIMAT, University of Toulouse, CNRS UMR 5085, INP-ENSIACET, 31062 Toulouse, FranceCIRIMAT, University of Toulouse, CNRS UMR 5085, INP-ENSIACET, 31062 Toulouse, FranceCIRIMAT, University of Toulouse, CNRS UMR 5085, INP-ENSIACET, 31062 Toulouse, FranceIEM, CNRS UMR 5635, Univ Montpellier, CEDEX 5, 34095 Montpellier, FranceIEM, CNRS UMR 5635, Univ Montpellier, CEDEX 5, 34095 Montpellier, FranceICSM, CEA, CNRS UMR 5257, Univ Montpellier, 30216 Bagnols-sur-Cèze, FranceIEM, CNRS UMR 5635, Univ Montpellier, CEDEX 5, 34095 Montpellier, FrancePlasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to determine the organosilicon films’ elemental composition and density. Spectroscopic ellipsometry measurements were carried out to determine the refractive index of the films. Quartz crystal microbalance (QCM) and ellipsometry coupled to vapor sorption were used to investigate the sorption mechanism of several VOC vapors into the films as a function of the plasma deposition conditions. The density and the refractive index of the PP-HMDSO films increased with the plasma energy due to a different chemical composition and different proportion of free volumes in the material network. The PP-HMDSO films showed different affinities towards the VOC vapors depending on the plasma discharge energy. The films elaborated in the lowest plasma energy revealed a good sensitivity towards the VOCs, especially toluene (one of the BTEX vapors), compared to the other films deposited under higher plasma energy. In addition, the selectivity between toluene and other non-BTEX VOCs such as heptane and ethanol decreased to become zero while increasing the plasma energy.https://www.mdpi.com/2571-6182/6/3/39organosiliconVOCssorptionthin filmsQCMellipsometry |
spellingShingle | Ghadi Dakroub Thomas Duguet Corinne Lacaze-Dufaure Stéphanie Roualdes Arie van der Lee Diane Rebiscoul Vincent Rouessac Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection Plasma organosilicon VOCs sorption thin films QCM ellipsometry |
title | Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection |
title_full | Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection |
title_fullStr | Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection |
title_full_unstemmed | Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection |
title_short | Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection |
title_sort | plasma polymerized organosilicon thin films for volatile organic compound voc detection |
topic | organosilicon VOCs sorption thin films QCM ellipsometry |
url | https://www.mdpi.com/2571-6182/6/3/39 |
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