Plasma Polymerized Organosilicon Thin Films for Volatile Organic Compound (VOC) Detection
Plasma polymerized (PP) thin films deposited in a soft or intermediate plasma discharge from hexamethyldisiloxane (HMDSO) were developed as sensors for the detection of volatile organic compound (VOC) vapors. Energy dispersive X-ray spectroscopy (EDX) and X-ray reflectometry (XRR) were performed to...
Hlavní autoři: | , , , , , , |
---|---|
Médium: | Článek |
Jazyk: | English |
Vydáno: |
MDPI AG
2023-09-01
|
Edice: | Plasma |
Témata: | |
On-line přístup: | https://www.mdpi.com/2571-6182/6/3/39 |