Piezoresistive sensors for atomic force microscopy
An important element in microelectronics is the comparison of the modelling and measurements results of the real semiconductor devices. Our paper describes the final results of numerical simulation of a micromechanical process sequence of the atomic force microscopy (AFM) sensors. They were obtaine...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
National Institute of Telecommunications
2001-03-01
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| Series: | Journal of Telecommunications and Information Technology |
| Subjects: | |
| Online Access: | https://jtit.pl/jtit/article/view/45 |