A planar nano-positioner driven by shear piezoelectric actuators
A planar nano-positioner driven by the shear piezoelectric actuators is proposed in this paper based on inertial sliding theory. The performance of the nano-positioner actuated by different driving signals is analyzed and discussed, e.g. the resolution and the average velocity which depend on the fr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-08-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4960838 |